Semiconductor & MEMS Fabrication

CFD Research Corporation (CFDRC) provides breakthrough solutions for the semiconductor process industry with three integrated technical capabilities:

Semiconductor & MEMS Fabrication
  • Reactor Scale Modeling & Simulation
  • Feature Scale Modeling & Simulation
  • Reaction Mechanism Design & Development

CFDRC was the first company to adapt and commercialize the use of CFD based tools and techniques for the semiconductor process industry. The developed multi-physics simulation tools CFD-ACE+ and CFD-TOPO are actively used by many equipment and device manufacturers, including Applied Materials, Novellus, Aixtron, Intel, and Motorola to improve equipment designs and process performance. CFDRC staff has worked closely with the semiconductor industry to understand the challenges, develop improved equipment designs, and optimize deposition processes.

Our mission is to enable rapid screening of concepts and optimization of downselected designs (simulation-based design) and processes, thereby accelerating your product development.

Contact us today to discuss matching your needs and our capabilities